Product
Parts
Ceramic
Electro Static Chuck
PKI provides total service including manufacture cleaning and Repair of ESC(Electro Static Chuck) for Semiconductor / Display business.
Main Products
   Anonizing ESC    MCA ESC
   Sapphire ESC    AI2O3 ESC
   AIN ESC
SiC Ceramic Part
PKI is supplying customized SiC products which are requiring thermal resistance and chemical stability. The product types are manufacturing as Susceptor, wafer carrier and Focus ring, etc.
FAB Utility
AFCS (Advanced Fluid Control System)
AFCS is one of advanced piping unit for exhausting gas. We introduce that AFCS shows excellent energy-saving result and temp maintaining performance compared POR SUS piping with heat jacket. It could avoid powder formation. AFCS can be operated by controller and it will be monitoring and recordable by system so we expect to reduce manufacturing issue. PKI provides total solution for design, commercial, repair and set-up of AFCS
Etc.
12” Etcher Consumable Parts (Maker: Lam Research)
MODEL OEM P/N DESCRIPTIOM
Flex45 857-073299-001 SEAL CHOKE RING CORE
Flex DS
Flex45 713-069935-003 KAPTON SHIM ON TCP
Flex DS
Flex45 713-072792-003 KAPTON SHIM ON ELECTRODE
Flex DS
Flex45 857-072806-005 (A)SHIELD GASKET ROUND TEFLON 450A
Flex DS
Flex45 857-073710-002 A)CIRLEX GASKET SET
Flex DS
Flex45 857-065064-005 ABE INNER
Flex DS
Flex45 857-027108-001 FLEX, CHOKE RING
Flex DS
Flex45 714-072727-048 JACKET RING, HEATSINK, HE
Flex DS COUPLING , RING300 Rev#1
Flex45 714-072728-003 HEAT INSULATOR RING, HEATSINK, ESC/COUPLIN
Flex DS
Flex45 713-073439-010 HEAT INSULATOR
Flex DS
Flex45 714-072728-117 RING, ESC/CPLNG,298,SP
Flex DS 714-072728-130
Flex45 857-085550-822 Sheet Flex FS Electrode Backside
Flex DS
Flex FX 857-073299-002 KIT, GASKET, TOP, ELTCD
Flex45 839-070842-004 ALL STUD SOCKET
Flex DS
Flex45 839-086924-052 Process Kit Etcher Parts Flex FX C-Section Ring Socket
Flex DS
Flex45 839-086924-050 Stud Socket Inner Flex FX
Flex DS
Flex 45 839-086924-051 Socket Flex FX Outer Cell
Flex45 839-086924-052 Process Kit Etcher Parts Flex FX C-Section Ring Socket
Flex DS
Flex 713-067673-002 PIN, ALIGN.UPR, ELCTD, 300MM
Flex FX 713-083166-001 SLV, ALGIN, INNER ELCTD
KIYO 713-083166-002 SLV, ALGIN, INNER ELCTD
STEPPED
KIYO EX 713-082885-002 SPACER TEFLON STG GAS INJECTOR
KIYO EX 716-082886-006 PROCESS KIIT UPPERCHAMBER KIYO
Flex FX 857-080373-010 SCREW KIT, SCR, TORX, NRDLK,6-32
Flex FX 719-078253-060 D RING, GASKET, GEL, CER, 509
719-078253-103(wide)